Équipe de Recherche en Physique de l'Information Quantique


Abstract = {Two different electron sensitive polymers, polymethylglutarimide and polymethylmethacrylate were employed to form submicron Au airbridges for use in mesoscopic devices. A series of test devices was fabricated in which this technique was used to make electrical contact to a submicron elliptical gate placed within a quantum point contact. The airbridge was patterned by electron beam lithography and metal lift-off. Conductance measurements were performed on the devices at low magnetic fields. The results confirmed both the presence of the elliptical antidot as a negative voltage was applied to the center gate, as well as the nonintrusive nature of the airbridge. {\copyright} 1999 American Vacuum Society.},
Author = {Feng, Y. and Sachrajda, A.S. and Zawadzki, P. and Kolind, S. and Buchanan, M. and Smet, J.H. and Lapointe, J. and Marshall, P.A.},
Document_Type = {Article},
Journal = {Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures},
Number = {6},
Pages = {3231-3234},
Source = {Scopus},
Title = {Fabrication of tunable antidot structures with submicron airbridges},
Url = {http://www.scopus.com/inward/record.url?eid=2-s2.0-0033273252&partnerID=40&md5=1cb8d7c2bd85ef60ef94dfc5d2c03a98},
Volume = {17},
Year = {1999},
Bdsk-Url-1 = {http://www.scopus.com/inward/record.url?eid=2-s2.0-0033273252&partnerID=40&md5=1cb8d7c2bd85ef60ef94dfc5d2c03a98}}