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Équipe de Recherche en Physique de l'Information Quantique



Publications


@article{INDUC,
Year = {2013},
Abstract = {},
author = {P. Harvey-Collard, A. Jouad, D. Drouin and M. Pioro-Ladrière},
title = {Inductively Coupled Plasma Etching of Amorphous Silicon Nanostructures over Nanotopography using C4F8-SS6 Chemistry},
journal = {Microelectronic Engineering 100, 408}}